For plasma polymerization, a polymerizable coating material (precursor) is added to a refillable tank vessel. This precursor is passed through the vaporization unit and – mixed with a precisely metered carrier gas – supplied to the nozzle outlet. The most accurate mass flows are ensured by using the integrated mass flow meter in conjunction with the controller. In the standard version, the ionization gases (process gases) compressed air or nitrogen can be used. Other gases available on request.