Nano-Plasma Cleaning of Silicon Wafers

Wafer manufacturing begins with a block of semiconductor material. This is sliced (sawed) into wafers, which are then polished in a chemical/mechanical process until the required surface roughness of a few nanometers is achieved.

Nanoreinigung eines Wafer
Polished and plasma treated wafer

In the next step, Openair-Plasma® is used as a highly efficient and simple procedure for super-fine cleaning of these nano-structures. One hundred percent of carbohydrates and particles are removed and error rates can be significantly reduced using this Openair-Plasma® cleaning.

/Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Wafer, /Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts, /Tags/Elektronik/Wafer, /Tags/Elektronik/Wafer-rechts

Related press articles

Plasma beam cleans and activates covering and sealing surfaces

ELEKTRONIK-PRAXIS (2/2008)
open document

"Give Leaks No Chance" - Plasma-pre-treatment protects electronics

KUNSTSTOFFE (5/2007)
open document

Secure protection for electronic components

ADHÄSION (4/2007)
open document

Contact

We are looking forward to your inquiry

In case of questions or suggestions, we are happy to help you. We look forward to your challenge. Here you find your personal contact for your inquiry.